Techniques for the fabrication of micro/nano systems, including ultra-thin films and multilayers. Industry-standard metrology techniques and technologies for characterization of the structure, chemistry and properties of micro/nano materials and devices. Fundamental fabrication technologies including bulk micromachining, surface micromachining and commercial methods. Bonding and packaging issues related to the micro/nano scale.
This course may not be repeated for credit.
Antirequisite(s)
- Credit for Electrical Engineering 616 and 619.50 will not be allowed.
Sections
This course will be offered next in
Winter 2022.