University of Calgary

ENEL 616 - Micro/Nano System Design, Fabrication and Integration - Winter 2021

Techniques for the fabrication of micro/nano systems, including ultra-thin films and multilayers. Industry-standard metrology techniques and technologies for characterization of the structure, chemistry and properties of micro/nano materials and devices. Fundamental fabrication technologies including bulk micromachining, surface micromachining and commercial methods. Bonding and packaging issues related to the micro/nano scale.
This course may not be repeated for credit.


  • (3-1)


  • Credit for Electrical Engineering 616 and 619.50 will not be allowed.


This course will be offered next in Winter 2022.
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