Microelectromechanical systems (MEMS) and devices including microsensors and microactuators. Principles of operation, material properties, fabrication techniques including surface and bulk micro­machining, IC-derived microfabrication techniques, sensing and actuation principles, sensor dynamics issues, circuit and system issues, packaging, calibration and testing. Illustrative examples include (1) micromachined inertial sensors and actuators for manufacturing processes, (2) microactuator arrays for "smart surfaces," (3) biosensors for medical applications, and (4) transducers for aerospace applications.
This course may not be repeated for credit.

Sections

This course will be offered next in Fall 2022.